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Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate
| Title: | Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate |
| Authors: | Sakurai, Yohei Browse this author | | Osaga, Tsuyoshi Browse this author | | Sugawara, Hirotake Browse this author →KAKEN DB |
| Keywords: | Etching | | ion flux | | Monte Carlo method | | neutral loop (NL) discharge (NLD) plasma | | quadrupole magnetic field | | separatrix | | uniformity |
| Issue Date: | Nov-2011 |
| Publisher: | IEEE |
| Journal Title: | IEEE Transactions on Plasma Science |
| Volume: | 39 |
| Issue: | 11 |
| Start Page: | 2550 |
| End Page: | 2551 |
| Publisher DOI: | 10.1109/TPS.2011.2128895 |
| Abstract: | The production and transport of ions in a neutral loop discharge plasma under a quadrupole magnetic field were investigated using a Monte Carlo method. The ion production occurred around the separatrices of the quadrupole magnetic field and decreased as the neutral loop shrunk. The ion flux on the substrate had its peak near the foot of a separatrix. It was demonstrated that the time-averaged ion flux on the substrate can be distributed uniformly by controlling the magnetic field so that the foot of the separatrix sweeps over the substrate. |
| Rights: | © 2011 IEEE. Reprinted, with permission, from Sakurai, Y., Osaga, T., Sugawara, H., Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate, IEEE Transactions on Plasma Science, Nov. 2011. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Hokkaido University products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it. |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/48516 |
| Appears in Collections: | 情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 菅原 広剛
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