Stochastic electron energy gain in inductively coupled magnetized plasmas accompanying electron reflection at chamber wall


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/75935

Title:	Stochastic electron energy gain in inductively coupled magnetized plasmas accompanying electron reflection at chamber wall
Authors:	Takahashi, Hironori Browse this author
	Nakashima, Katsuhiro Browse this author
	Yamamoto, Tappei Browse this author
	Sugawara, Hirotake Browse this author →KAKEN DB
Issue Date:	26-Oct-2018
Journal Title:	Japanese Journal of Applied Physics
Volume:	57
Issue:	12
Start Page:	126101
Publisher DOI:	10.7567/JJAP.57.126101
Abstract:	Single-electron motions near the chamber wall of a type of inductively coupled magnetized plasmas were analyzed using a Monte Carlo method to understand the mechanism of electron energy gain (EEG). The analysis revealed a counterintuitive mechanism that electron reflection promotes the EEG in the presence of E × B drifts and collisional scattering. Distributions of EEG, energy loss, and mean electron energy were calculated using a simplified flat wall model at various strengths of electric and magnetic fields and remaining energy ratios at specular and diffuse reflections. A high stochastic EEG was observed near the wall clearly at high electric
Rights:	© 2018 The Japan Society of Applied Physics
Type:	article (author version)
URI:	http://hdl.handle.net/2115/75935
Appears in Collections:	情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菅原広剛

OAI-PMH ( junii2 , jpcoar_1.0 )

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