2024-03-28T22:57:05Zhttps://eprints.lib.hokudai.ac.jp/dspace-oai/requestoai:eprints.lib.hokudai.ac.jp:2115/417682019-03-18T09:57:10Zhdl_2115_40344hdl_2115_40231hdl_2115_139エリプソ・インタフェロメトリにおける多重反射と回折の影響Effects of Multiple Reflection and Diffraction on Lateral Resolution of Ellipso-Interferometry三島, 瑛人Mishima, Teruhito佐藤, 邦宏Satoh, Kunihiro伊藤, 泰宏Itoh, Yasuhiro桜庭, 一郎Sakuraba, Ichiroopen access500北海道大学Hokkaido University1983-01-31jpndepartmental bulletin paperVoRhttp://hdl.handle.net/2115/417680385-602XAN00230223北海道大學工學部研究報告Bulletin of the Faculty of Engineering, Hokkaido University1125767https://eprints.lib.hokudai.ac.jp/dspace/bitstream/2115/41768/1/112_57-68.pdfapplication/pdf622.42 KB1983-01-31