2024-03-28T16:47:05Zhttps://eprints.lib.hokudai.ac.jp/dspace-oai/requestoai:eprints.lib.hokudai.ac.jp:2115/286342022-11-17T02:08:08Zhdl_2115_20045hdl_2115_139Laser micromachining of porous anodic alumina filmJha, HimendraKikuchi, TatsuyaSakairi, MasatoshiTakahashi, Hideaki572A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 μm were fabricated on anodic alumina film with good precision and reproducibility.Springer Berlin / HeidelbergJournal Articleapplication/pdfhttp://hdl.handle.net/2115/28634https://eprints.lib.hokudai.ac.jp/dspace/bitstream/2115/28634/1/APA88-4.pdf0947-83961432-0630Applied Physics A: Materials Science & Processing8846176222007-09enginfo:doi/10.1007/s00339-007-4140-4The original publication is available at www.springerlink.comauthor