2024-03-29T09:17:01Zhttps://eprints.lib.hokudai.ac.jp/dspace-oai/requestoai:eprints.lib.hokudai.ac.jp:2115/474122022-11-17T02:08:08Zhdl_2115_20045hdl_2115_139Enhanced Capacitance of Composite Anodic ZrO2Films Comprising High Permittivity Oxide Nanocrystals and Highly Resistive Amorphous Oxide MatrixHabazaki, HirokiKoyama, ShunAoki, YoshitakaSakaguchi, NorihitoNagata, Shinjianodic oxidedielectric filmnanocomposite oxideZrO2capacitor430Anodic oxide films with nanocrystalline tetragonal ZrO2 precipitated in an amorphous oxide matrix were formed on Zr Si and Zr Al alloys and had significantly enhanced capacitance in comparison with those formed on zirconium metal. The capacitance enhancement was associated with the formation of a high-temperature stable tetragonal ZrO2 phase with high relative permittivity as well as increased ionic resistivity, which reduces the thickness of anodic oxide films at a certain formation voltage. However, there is a general empirical trend that single-phase materials with higher permittivity have lower ionic resistivity. This study presents a novel material design based on a nanocrystalline amorphous composite anodic oxide film for capacitor applications.American Chemical SocietyJournal Articleapplication/pdfhttp://hdl.handle.net/2115/47412https://eprints.lib.hokudai.ac.jp/dspace/bitstream/2115/47412/1/AMI3_2665-2670.pdf1944-82441944-8252AA12406529ACS Applied Materials & Interfaces37266526702011-07-27enginfo:pmid/21648468info:doi/10.1021/am200460cThis document is the unedited Author's version of a Submitted Work that was subsequently accepted for publication in ACS Applied Materals & Interfaces, copyright © American Chemical Society after peer review. To access the final edited and published work see [DOI: 10.1021/am200460c].author