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Akazawa, Masamichi
;
Kamoshida, Ryo
;
Murai, Shunta
;
Kachi, Tetsu
;
Uedono, Akira
Low-temperature annealing behavior of defects in Mg-ion-implanted GaN studied using MOS diodes and monoenergetic positron beam
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Japanese Journal of Applied Physics (JJAP)
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1-Jan-2021
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