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Ikutame, Naoki
;
Kawaguchi, Keiga
;
Ikeda, Hiroshi
;
Sakai, Daisuke
;
Harada, Kenji
;
Funatsu, Shiro
;
Nishii, Junji
Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching
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Journal of applied physics
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28-Aug-2013
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