Hokkaido University Collection of Scholarly and Academic Papers >
Showing results 1 to 2 of 2
Type | Author(s) | Title | Other Titles | Citation | Citation(alt) | Issue Date | bulletin (article) | 勇田, 敏夫; 小山内, 潤; 佐藤, 敏一; 高橋, 達男 | 反応性スパッタ・エッチングの研究 : 各種ガスの鋼加工特性について | A Study of Reactive Sputter Etching : On the Etching Characteristics of Carbon Steel by using various gases | 北海道大學工學部研究報告 | Bulletin of the Faculty of Engineering, Hokkaido University | 31-Oct-1986 |
bulletin (article) | 勇田, 敏夫; 小山内, 潤; 佐藤, 敏一; 高橋, 達男 | フレオンガスによる炭素鋼の反応性スパッタ・エッチングの研究 : 酸素ガス混合の効果について | A Study of Reactive Sputter Etching for Carbon Steel by Freon Gas : On the Effect of Oxygen Gas Mixture | 北海道大學工學部研究報告 | Bulletin of the Faculty of Engineering, Hokkaido University | 31-Oct-1985 |
Showing results 1 to 2 of 2
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