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田中, 利広
;
石井, 敦司
;
萩田, 晃一
;
大野, 英男
;
長谷川, 英機
高融点金属ゲートを用いたセルフアライン形InP MISFETの製作プロセスの検討
Fabrication Process of Self-Aligned InP MISFETs Using Refractory Metal Gates
北海道大學工學部研究報告
Bulletin of the Faculty of Engineering, Hokkaido University
29-Jul-1988
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