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下妻, 光夫
;
石川, 基博
;
田頭, 博昭
50HzプラズマCVD法による高分子材料上へのシリコン酸化膜生成
Deposition of Silicon Oxide Film on Polymer Substrade Using 50Hz Plasma CVD Method
北海道大学医療技術短期大学部紀要
-
Dec-1992
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