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TypeAuthor(s)TitleOther TitlesCitationCitation(alt)Issue Date
bulletin (article)勇田, 敏夫; 小山内, 潤; 佐藤, 敏一; 高橋, 達男フレオンガスによる炭素鋼の反応性スパッタ・エッチングの研究 : 酸素ガス混合の効果についてA Study of Reactive Sputter Etching for Carbon Steel by Freon Gas : On the Effect of Oxygen Gas Mixture北海道大學工學部研究報告Bulletin of the Faculty of Engineering, Hokkaido University31-Oct-1985
bulletin (article)勇田, 敏夫; 小山内, 潤; 佐藤, 敏一; 高橋, 達男反応性スパッタ・エッチングの研究 : 各種ガスの鋼加工特性についてA Study of Reactive Sputter Etching : On the Etching Characteristics of Carbon Steel by using various gases北海道大學工學部研究報告Bulletin of the Faculty of Engineering, Hokkaido University31-Oct-1986
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