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article (author version)Endo, Makoto; Jin, Zhi; Kasai, Seiya; Hasegawa, HidekiReactive Ion Beam Etching of GaN and AlGaN/GaN for Nanostructure Fabrication Using Methane-Based Gas Mixtures-Japanese Journal of Applied Physics. Pt. 1, Regular papers, short notes & review papers-Apr-2002
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