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Hino, Tomoaki
;
Fujita, Ichiro
;
Yamashina, Toshiro
;
Ueda, Noriaki
;
Asami, Naoto
;
Nishikawa, Masana
Model for Deposition of Thin Films in Plasma CVD
-
北海道大學工學部研究報告
Bulletin of the Faculty of Engineering, Hokkaido University
29-Oct-1993
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