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Showing results 1 to 3 of 3
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article (author version)
Takahashi, Hironori
;
Sugawara, Hirotake
Stochastic electron energy gain under sheath electric field near sidewall of chamber to drive inductively coupled magnetized plasmas
-
Japanese Journal of Applied Physics (JJAP)
-
1-Mar-2020
article (author version)
Nakashima, Katsuhiro
;
Takahashi, Hironori
;
Sugawara, Hirotake
Phase-resolved profiles of electron energy deposition in inductively coupled radio-frequency plasmas driven under confronting divergent magnetic fields
-
Japanese Journal of Applied Physics
-
16-Oct-2019
article (author version)
Takahashi, Hironori
;
Nakashima, Katsuhiro
;
Yamamoto, Tappei
;
Sugawara, Hirotake
Stochastic electron energy gain in inductively coupled magnetized plasmas accompanying electron reflection at chamber wall
-
Japanese Journal of Applied Physics
-
26-Oct-2018
Showing results 1 to 3 of 3
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