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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.162 >

多結晶Si/単結晶Si界面における自然酸化膜の球状化現象

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/42325

Title: 多結晶Si/単結晶Si界面における自然酸化膜の球状化現象
Other Titles: Balling-up Phenomena of Native Oxiside Film on Poly-Si/Single-crystal-Si Interface
Authors: 大貫, 惣明1 Browse this author
木村, 道哉2 Browse this author
高橋, 平七郎3 Browse this author
木村, 幸治4 Browse this author
熊丸, 邦明5 Browse this author
Authors(alt): Ohnuki, Somei1
Kimura, Michiya2
Takahashi, Heishichiro3
Kimura, Koji4
Kumamaru, Kuniaki5
Issue Date: 29-Jan-1993
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 162
Start Page: 127
End Page: 135
Type: bulletin (article)
URI: http://hdl.handle.net/2115/42325
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.162

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