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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.162 >
多結晶Si/単結晶Si界面における自然酸化膜の球状化現象
Title: | 多結晶Si/単結晶Si界面における自然酸化膜の球状化現象 |
Other Titles: | Balling-up Phenomena of Native Oxiside Film on Poly-Si/Single-crystal-Si Interface |
Authors: | 大貫, 惣明1 Browse this author | 木村, 道哉2 Browse this author | 高橋, 平七郎3 Browse this author | 木村, 幸治4 Browse this author | 熊丸, 邦明5 Browse this author |
Authors(alt): | Ohnuki, Somei1 | Kimura, Michiya2 | Takahashi, Heishichiro3 | Kimura, Koji4 | Kumamaru, Kuniaki5 |
Issue Date: | 29-Jan-1993 |
Publisher: | 北海道大学 |
Journal Title: | 北海道大學工學部研究報告 |
Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
Volume: | 162 |
Start Page: | 127 |
End Page: | 135 |
Type: | bulletin (article) |
URI: | http://hdl.handle.net/2115/42325 |
Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.162
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