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Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field
| Title: | Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field |
| Authors: | Sugawara, Hirotake Browse this author | | Osaga, Tsuyoshi Browse this author | | Yamamoto, Hiromori Browse this author |
| Keywords: | Rectification effect | | Gradient antiparallel magnetic fields | | Electron transport |
| Issue Date: | Aug-2011 |
| Publisher: | IOP Publishing |
| Journal Title: | Plasma Sources Science and Technology |
| Volume: | 20 |
| Issue: | 5 |
| Start Page: | 055002 |
| Publisher DOI: | 10.1088/0963-0252/20/5/055002 |
| Abstract: | Electron transport in CF4 under linearly gradient antiparallel magnetic fields was analysed in order to investigate the fundamental properties of magnetic neutral loop discharge plasmas used for material processing. The electron motion was simulated by a Monte Carlo method under a radio-frequency (rf) electric field applied perpendicularly to both the directions of the magnetic field and its gradient. Two typical electron motions, meandering in a weak magnetic field and gyration in a strong magnetic field, were observed with particular directionalities. The meandering electrons drifted forward on average similarly to those under a dc electric field. The gyration induced an electron drift towards the inverse direction. The direction of electron flux was dependent not only on the rf phase but also on the distance from the magnetically neutral midplane between the antiparallel magnetic fields. The electron conduction path formed along the midplane had a structure consisting of forward and inverse lanes. A peculiar result was that the direction of local electron flux was always forward in the strong magnetic field whereas the drift of gyrating electrons was towards the inverse direction. This seemingly paradoxical result can appear in the presence of the density gradient of the electron distribution. |
| Rights: | Copyright © 2011 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in Plasma Sources Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher-authenticated version is available online at 10.1088/0963-0252/20/5/055002.' |
| Relation: | http://iopscience.iop.org/0963-0252/20/5/055002 |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/50049 |
| Appears in Collections: | 情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 菅原 広剛
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