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Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

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Title: Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques
Authors: Kikuchi, Tatsuya Browse this author →KAKEN DB
Wachi, Yuhta Browse this author
Takahashi, Taka-aki Browse this author
Sakairi, Masatoshi Browse this author →KAKEN DB
Suzuki, Ryosuke O. Browse this author →KAKEN DB
Keywords: Aluminum
Anodizing
Laser irradiation
Electropolishing
Microlens array
Issue Date: 1-Apr-2013
Publisher: Elsevier
Journal Title: Electrochimica Acta
Volume: 94
Start Page: 269
End Page: 276
Publisher DOI: 10.1016/j.electacta.2013.02.020
Abstract: An anodic alumina microlens array was fabricated by laser irradiation and electrochemical techniques. An aluminum specimen covered with a porous oxide film was irradiated with a pulsed Nd-YAG laser, and then electropolished to dissolve the aluminum substrate. A well-defined semi-elliptical micropore was formed on the aluminum by electropolishing. The immersion of the electropolished specimen in a CrO3/H3PO4 solution resulted in the dissolution of the remaining anodic oxide film. Subsequent re-anodizing enabled the formation of a characteristic meniscus-shaped oxide film on the micropore. A microlens array made of the thin anodic alumina film, which showed flexibility and heat resistance, was successfully fabricated by the lift-off of the anodic oxide. (C) 2013 Elsevier Ltd. All rights reserved.
Type: article (author version)
URI: http://hdl.handle.net/2115/53116
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菊地 竜也

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