Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

Kikuchi, Tatsuya; Wachi, Yuhta; Takahashi, Taka-aki; Sakairi, Masatoshi; Suzuki, Ryosuke O.

doi:10.1016/j.electacta.2013.02.020


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Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/53116

Title:	Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques
Authors:	Kikuchi, Tatsuya Browse this author →KAKEN DB
	Wachi, Yuhta Browse this author
	Takahashi, Taka-aki Browse this author
	Sakairi, Masatoshi Browse this author →KAKEN DB
	Suzuki, Ryosuke O. Browse this author →KAKEN DB
Keywords:	Aluminum
	Anodizing
	Laser irradiation
	Electropolishing
	Microlens array
Issue Date:	1-Apr-2013
Publisher:	Elsevier
Journal Title:	Electrochimica Acta
Volume:	94
Start Page:	269
End Page:	276
Publisher DOI:	10.1016/j.electacta.2013.02.020
Abstract:	An anodic alumina microlens array was fabricated by laser irradiation and electrochemical techniques. An aluminum specimen covered with a porous oxide film was irradiated with a pulsed Nd-YAG laser, and then electropolished to dissolve the aluminum substrate. A well-defined semi-elliptical micropore was formed on the aluminum by electropolishing. The immersion of the electropolished specimen in a CrO3/H3PO4 solution resulted in the dissolution of the remaining anodic oxide film. Subsequent re-anodizing enabled the formation of a characteristic meniscus-shaped oxide film on the micropore. A microlens array made of the thin anodic alumina film, which showed flexibility and heat resistance, was successfully fabricated by the lift-off of the anodic oxide. (C) 2013 Elsevier Ltd. All rights reserved.
Type:	article (author version)
URI:	http://hdl.handle.net/2115/53116
Appears in Collections:	工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菊地竜也

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