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A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
| Title: | A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer |
| Authors: | Xiong, Xin Browse this author | | Shimizu, Yuki Browse this author | | Matsukuma, Hiraku Browse this author | | Gao, Wei Browse this author |
| Keywords: | optical encoder | | linear scale | | pitch deviation | | stitching interferometry | | self-calibration |
| Issue Date: | Nov-2021 |
| Publisher: | MDPI |
| Journal Title: | Sensors |
| Volume: | 21 |
| Issue: | 21 |
| Start Page: | 7412 |
| Publisher DOI: | 10.3390/s21217412 |
| Abstract: | An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures' measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area. |
| Type: | article |
| URI: | http://hdl.handle.net/2115/83618 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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