Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte

Sato, Taketomo; Fujino, Toshiyuki; Hasegawa, Hideki

Applied Surface Science, 2006, 252(15), 5457-5461

Permalink : https://hdl.handle.net/2115/14591

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アクセス権	open access
URI	https://hdl.handle.net/2115/14591
タイトル	Self-assembled formation of uniform InP nanopore arrays by electrochemical anodization in HCl based electrolyte
著者	Sato, Taketomo ; Fujino, Toshiyuki ; Hasegawa, Hideki
e-Rad_Researcher 50343009 著者名 Sato, Taketomo
著者名 Fujino, Toshiyuki
著者名 Hasegawa, Hideki
言語	英語
キーワード	Electrochemical anodization
	Porous structure
	InP
	(0 0 1)
	(1 1 1)A
	(1 1 1)B
発行日	2006-05-30
出版者	Elsevier B.V.
収録物名	Applied Surface Science
巻(号)	252(15)
ページ	5457-5461
抄録	Attempts were made to optimize the electrochemical anodization process for the formation of high-density, regular and straight nanopore arrays on InP. The structure, shape and size of the pores were very sensitive to substrate orientations, electrolyte concentrations and anodization voltages. Among (1 1 1)A, (1 1 1)B and (0 0 1) substrate orientations, the most uniform and most straight nanopore arrays were obtained on (0 0 1) substrates at anodization voltages of 5–7 V by using 1.0–1.5 M HCl electrolyte containing HNO3. The pore depth could be controlled up to 80 μm by the anodization time.
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
PISSN	0169-4332
関連情報	URI http://www.sciencedirect.com/science/journal/01694332
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.1016/j.apsusc.2005.12.085