open access

https://hdl.handle.net/2115/25156

Micro-patterning in anodic oxide film on aluminium by laser irradiation

英語

MEMS

2007-04-01

Elsevier

Electrochimica Acta

52(14)

4724-4733

Microstructures such as microchannels and microchambers were fabricated on anodic oxide film of aluminium with laser direct patterning technique. The aluminium substrate covered with porous type anodic oxide film was dyed with organic dyes followed by hydrothermal treatment. The coloured and pore sealed film shows much higher absorption then as-formed porous film, that makes possible to pattern various types of microstructures on the film by removing the upper part of the film surface by laser irradiation. Structure of the crystallized hydroxide layer on the surface of the anodic oxide film, formed during pore sealing, as well as the partial removal of anodic oxide film from the surface is described. Microstructures with depth lower than 1–27 μm were patterned successfully on 16 and 32 μm thick anodic oxide film surfaces, using various combinations of laser power and laser scanning speed. The affect of the laser scanning speed and laser power density on the shape of the microstructures is also explained.

学術雑誌論文

Accepted Manuscript

0013-4686