Laser micromachining of porous anodic alumina film

Jha, Himendra; Kikuchi, Tatsuya; Sakairi, Masatoshi et al.

Applied Physics A: Materials Science & Processing, 2007, 88(4), 617-622

Permalink : https://hdl.handle.net/2115/28634

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アクセス権	open access
URI	https://hdl.handle.net/2115/28634
タイトル	Laser micromachining of porous anodic alumina film
著者	Jha, Himendra ; Kikuchi, Tatsuya ; Sakairi, Masatoshi ; Takahashi, Hideaki
著者名 Jha, Himendra
e-Rad_Researcher 60374584 著者名 Kikuchi, Tatsuya
e-Rad_Researcher 50280847 著者名 Sakairi, Masatoshi
著者名 Takahashi, Hideaki
言語	英語
発行日	2007-09
出版者	Springer Berlin / Heidelberg
収録物名	Applied Physics A: Materials Science & Processing
巻(号)	88(4)
ページ	617-622
抄録	A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 μm were fabricated on anodic alumina film with good precision and reproducibility.
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
権利情報	The original publication is available at www.springerlink.com
PISSN	0947-8396
EISSN	1432-0630
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.1007/s00339-007-4140-4