Microfabrication of an anodic oxide film by anodizing laser-textured aluminium

Jha, Himendra; Kikuchi, Tatsuya; Sakairi, Masatoshi; Takahashi, Hideaki

Microfabrication of an anodic oxide film by anodizing laser-textured aluminium

Jha, Himendra; Kikuchi, Tatsuya; Sakairi, Masatoshi et al.

Journal of Micromechanics and Microengineering, 2007, 17(10), 1949-1955

Permalink : https://hdl.handle.net/2115/30212

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アクセス権	open access
URI	https://hdl.handle.net/2115/30212
タイトル	Microfabrication of an anodic oxide film by anodizing laser-textured aluminium
著者	Jha, Himendra ; Kikuchi, Tatsuya ; Sakairi, Masatoshi ; Takahashi, Hideaki
著者名 Jha, Himendra
e-Rad_Researcher 60374584 著者名 Kikuchi, Tatsuya
e-Rad_Researcher 50280847 著者名 Sakairi, Masatoshi
著者名 Takahashi, Hideaki
言語	英語
発行日	2007-10
出版者	IOP Institute of Physics
収録物名	Journal of Micromechanics and Microengineering
巻(号)	17(10)
ページ	1949-1955
抄録	A simple method for the fabrication of microstructures of an aluminium anodic oxide film (anodic alumina) by anodizing laser-textured aluminium is demonstrated. In the process, the aluminium substrate was first textured by a low power laser beam, and then the textured aluminium was subjected to anodizing, to develop a continuous, thick porous layer on the textured surface. Microstructures with a depth of a few to several tens of micrometres were fabricated successfully on the anodic oxide film by using various combinations of laser power density and laser scanning speed. Removing the film from the aluminium substrate enables the fabrication of various 2D and 3D microstructures from anodic alumina.
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
権利情報	Copyright © 2007 IOP Publishing Ltd.
PISSN	0960-1317
EISSN	1361-6439
関連情報	URI http://www.iop.org/
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.1088/0960-1317/17/10/004