Fabrication of Three-Dimensional Platinum Microstructures with Laser Irradiation and Electrochemical Technique

Kikuchi, T.; Takahashi, H.; Maruko, T.

Electrochimica Acta, 2007, 52(7), 2352-2358

Permalink : https://hdl.handle.net/2115/34556

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アクセス権
open access
URI
https://hdl.handle.net/2115/34556
タイトル
Fabrication of Three-Dimensional Platinum Microstructures with Laser Irradiation and Electrochemical Technique
著者
Kikuchi, T. ; Takahashi, H. ; Maruko, T.
e-Rad_Researcher
60374584
著者名
Kikuchi, T.
著者名
Takahashi, H.
著者名
Maruko, T.
言語
英語
キーワード
Aluminum
Platinum
Laser Irradiation
Electroplating
MEMS
発行日
2007-02-01
出版者
Pergamon
収録物名
Electrochimica Acta
巻(号)
52(7)
ページ
2352-2358
抄録
Three-dimensional platinum microstructures were fabricated by successive procedures: aluminum anodizing, laser irradiation, nickel / platinum electroplating, and removal of the aluminum substrate, the oxide films, and the nickel metal layer. Aluminum plates and rods were anodized in an oxalic acid solution to form porous type oxide films. The anodized specimens were immersed in a nickel electroplating solution, and then irradiated with a pulsed Nd-yttrium aluminum garnet (YAG) laser beam to remove the anodic oxide film with a three-dimensional XYZθstage. The specimens were cathodically polarized in the nickel and a platinum electroplating solution to form the metal micropattern at the laser-irradiated area. The electroplated specimens were immersed in NaOH solution to dissolve the aluminum substrate and the oxide films, and then immersed in HCl solution to dissolve the nickel deposits. A platinum grid-shaped microstructure, a microspring, and a cylindrical network microstructure with 50-100 μm line width were obtained successfully.
資源タイプ
学術雑誌論文
出版タイプ
Accepted Manuscript
PISSN
0013-4686
関連情報 (isVersionOf)
出版社版DOI
https://doi.org/10.1016/j.electacta.2006.08.040