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アクセス権	open access
URI	https://hdl.handle.net/2115/44285
タイトル	In situ observation of self-organizing nanodot formation under nanosecond-pulsed laser irradiation on Si surface
著者	WATANABE, S. ; YOSHIDA, Y. ; KAYASHIMA, S. ; YATSU, S. ; KAWAI, M. ; KATO, T.
著者名 WATANABE, S.
著者名 YOSHIDA, Y.
著者名 KAYASHIMA, S.
著者名 YATSU, S.
著者名 KAWAI, M.
著者名 KATO, T.
言語	英語
キーワード	diffusion
	elemental semiconductors
	high-speed optical techniques
	laser materials processing
	nanostructured materials
	scanning electron microscopy
	self-assembly
	silicon
発行日	2010
出版者	American Institute of Physics
収録物名	Journal of Applied Physics
巻(号)	108(10)
ページ	103510-1-103510-5
抄録	An in situ observation of the formation of a laser-irradiation-induced nanodot array on a Si surface performed using a pulsed-laser-equipped high-voltage electron microscope (laser-HVEM). Under multiple nanosecond (ns) pulsed laser irradiation shots, atomic clusters were firrst formed and distributed on the surface in order to grow them epitaxially into protruded dots with diameters of ten nanometers or less. This is followed by their diffusion induced by successive laser shots to cannibalize and merge them into a ripple line with aligned, larger dots. We conclude that the present subwavelength two-dimensionally-ordered nanodot array is formed by self-organization under pulsed laser irradiation.
資源タイプ	学術雑誌論文
出版タイプ	Version of Record
権利情報	Copyright 2010 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
PISSN	0021-8979
EISSN	1089-7550
NCID	AA00693547
関連情報	URI http://www.aip.org/
関連情報 (isIdenticalTo)	出版社版DOI https://doi.org/10.1063/1.3512888

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