open access

https://hdl.handle.net/2115/44420

Numerical simulation of electron transport in electric and magnetic fields for analysis of electron temperature and number density profiles measured in an argon magnetic neutral loop discharge plasma

英語

2010-08-20

Japan Society of Applied Physics

Japanese Journal of Applied Physics

49(8)

086001-1-086001-5

A Monte Carlo simulation of electron transport in electric and magnetic fields was performed to analyze experimental data of the electron temperature T_e and electron number density n_e measured in a magnetic neutral loop discharge (NLD) plasma driven in Ar at 0.13 Pa. T_e and n_e in the vicinity of the substrate holder were measured with a triple probe, and their radial profiles had peaks at different radial positions. The simulation reproduced these peak positions well under the chosen boundary condition that the electron reflectivity of the side wall was lower than that of the reactor ceiling and the substrate holder. It was explained that the T_e peak was formed by high-energy electrons transported from the neutral loop along a separatrix of the quadrupole magnetic field and that the n_e peak consisted of electrons undergoing reciprocating motion between the reactor ceiling and the substrate.

学術雑誌論文

Accepted Manuscript

© 2010 The Japan Society of Applied Physics

0021-4922

1347-4065

AA12295836