Acid formation in polymer solids by radiation-induced chain reactions of diphenyliodonium salts

Koizumi, Hitoshi; Terae, Mitsuhiro; Yamazaki, Kenta et al.

Radiation Physics and Chemistry, 2011, 80(2), 190-195

Permalink : https://hdl.handle.net/2115/44782

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アクセス権	open access
URI	https://hdl.handle.net/2115/44782
タイトル	Acid formation in polymer solids by radiation-induced chain reactions of diphenyliodonium salts
著者	Koizumi, Hitoshi ; Terae, Mitsuhiro ; Yamazaki, Kenta ; Iino, Kouji
著者名 Koizumi, Hitoshi
著者名 Terae, Mitsuhiro
著者名 Yamazaki, Kenta
著者名 Iino, Kouji
言語	英語
キーワード	Iodonium salt
	γ-Radiation
	Acetals
	Polyvinyl acetals
	Chemically amplified resists
発行日	2011-02
出版者	Elsevier
収録物名	Radiation Physics and Chemistry
巻(号)	80(2)
ページ	190-195
抄録	In order to develop chemically amplified radiation resist having ability of acid multiplication, acid formation in γ-irradiated polymer films and solutions of acetal compounds containing diphenyliodonium salt has been studied. Acids were generated in the films and solutions by chain reactions of large G-value. The G-value depends on the chemical structure of the polymers and acetal compounds. Compounds containing cyclic acetal structure give large G-values. This dependence can be explained by difference in the possibility of the electron transfer from radicals of the polymers and acetal compounds to diphenyliodonium salt. Polyvinyl acetals will be a candidate for the dually amplified resist.
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
PISSN	0969-806X
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.1016/j.radphyschem.2010.07.031