Self-Organized Two-Dimensional　Vidro-Nanodot　Array on Laser-Irradiated Si Surface

Yoshida, Yutaka; Sakaguchi, Norihito; Watanabe, Seiichi et al.

Applied Physics Express, 2011, 4(5), 055202

Permalink : https://hdl.handle.net/2115/45487

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アクセス権	open access
URI	https://hdl.handle.net/2115/45487
タイトル	Self-Organized Two-Dimensional　Vidro-Nanodot　Array on Laser-Irradiated Si Surface
著者	Yoshida, Yutaka ; Sakaguchi, Norihito ; Watanabe, Seiichi ; Kato, Takahiko
著者名 Yoshida, Yutaka
著者名 Sakaguchi, Norihito
著者名 Watanabe, Seiichi
著者名 Kato, Takahiko
言語	英語
発行日	2011-05
出版者	The Japan Society of Applied Physics
収録物名	Applied Physics Express
巻(号)	4(5)
ページ	055202
抄録	We report a periodic two-dimensional (2D) array of uniquely shaped dotlike nanoprotrusions (NPs), which simultaneously self-organize on a Si surface under pulsed laser irradiation. The shape of the dotlike NPs can be controlled by adjusting the number of laser pulses. The flask-shaped dotlike NP array is named a vidro-nanodot (VND) array. We present a detailed analysis of the internal structure of VND using high-resolution electron microscopy.
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
権利情報	©2011 The Japan Society of Applied Physics
PISSN	1882-0778
EISSN	1882-0786
NCID	AA12295133
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.1143/APEX.4.055202