open access

https://hdl.handle.net/2115/48516

Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate

英語

uniformity

2011-11

IEEE

IEEE Transactions on Plasma Science

39(11)

2550-2551

The production and transport of ions in a neutral loop discharge plasma under a quadrupole magnetic field were investigated using a Monte Carlo method. The ion production occurred around the separatrices of the quadrupole magnetic field and decreased as the neutral loop shrunk. The ion flux on the substrate had its peak near the foot of a separatrix. It was demonstrated that the time-averaged ion flux on the substrate can be distributed uniformly by controlling the magnetic field so that the foot of the separatrix sweeps over the substrate.

学術雑誌論文

Accepted Manuscript

© 2011 IEEE. Reprinted, with permission, from Sakurai, Y., Osaga, T., Sugawara, H., Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate, IEEE Transactions on Plasma Science, Nov. 2011. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Hokkaido University products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.

0093-3813