open access

https://hdl.handle.net/2115/51153

Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied by in situ laser-light scattering

英語

2012-12-19

IOP Publishing

Journal of Physics D: Applied Physics

45(50)

505202

This paper reports the temporal evolution, the dependence on the discharge conditions, and the spatial distribution of Cu particulates synthesized in high-pressure magnetron sputtering plasmas. The spatial distributions of the size and the density of particulates were examined with precision using a two-wavelength laser light scattering technique. We found that more than 50% of Cu particulates in the discharge space had sizes ranging between 100 and 175 nm. The absolute density of Cu particulate was on the order of 10^[7]-10^[9] cm^[-3]. Cu particulates had concentrated distributions in the boundary between the bright plasma and the dark region and in the region connecting to the anode of the magnetron sputtering source. The spatial distribution, the size distribution, and the density of Cu particulates were sensitively dependent on the discharge power and pressure.

学術雑誌論文

Accepted Manuscript

This is an author-created, un-copyedited version of an article accepted for publication in Journal of Physics D: Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at 10.1088/0022-3727/45/50/505202.

0022-3727