Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

Kikuchi, Tatsuya; Wachi, Yuhta; Takahashi, Taka-aki et al.

Electrochimica Acta, 2013, 94, 269-276

Permalink : https://hdl.handle.net/2115/53116

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アクセス権
open access
URI
https://hdl.handle.net/2115/53116
タイトル
Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques
著者
Kikuchi, Tatsuya ; Wachi, Yuhta ; Takahashi, Taka-aki ; Sakairi, Masatoshi ; Suzuki, Ryosuke O.
e-Rad_Researcher
60374584
著者名
Kikuchi, Tatsuya
著者名
Wachi, Yuhta
著者名
Takahashi, Taka-aki
e-Rad_Researcher
50280847
著者名
Sakairi, Masatoshi
e-Rad_Researcher
80179275
著者名
Suzuki, Ryosuke O.
言語
英語
キーワード
Aluminum
Anodizing
Laser irradiation
Electropolishing
Microlens array
発行日
2013-04-01
出版者
Elsevier
収録物名
Electrochimica Acta
巻(号)
94
ページ
269-276
抄録
An anodic alumina microlens array was fabricated by laser irradiation and electrochemical techniques. An aluminum specimen covered with a porous oxide film was irradiated with a pulsed Nd-YAG laser, and then electropolished to dissolve the aluminum substrate. A well-defined semi-elliptical micropore was formed on the aluminum by electropolishing. The immersion of the electropolished specimen in a CrO3/H3PO4 solution resulted in the dissolution of the remaining anodic oxide film. Subsequent re-anodizing enabled the formation of a characteristic meniscus-shaped oxide film on the micropore. A microlens array made of the thin anodic alumina film, which showed flexibility and heat resistance, was successfully fabricated by the lift-off of the anodic oxide. (C) 2013 Elsevier Ltd. All rights reserved.
資源タイプ
学術雑誌論文
出版タイプ
Accepted Manuscript
PISSN
0013-4686
関連情報 (isVersionOf)
出版社版DOI
https://doi.org/10.1016/j.electacta.2013.02.020