open access

https://hdl.handle.net/2115/53390

Characteristics of Electron Conduction in a Gas under a Quadrupole Magnetic Field and Radio-Frequency Electric Fields

英語

quadrupole magnetic

2013-05

The Japan Society of Applied Physics

Japanese Journal of Applied Physics

52

056101

Electron conduction in CF4 under a simplified model quadrupole magnetic field (QMF) and rf electric fields at f ¼ 13:56, 27.12, and 40.68MHz was analyzed using a Monte Carlo method, following the manner of electron swarm analyses. This field configuration simulated current paths of magnetic neutral loop discharge plasmas used for dry etching. The electron conduction therein was focused on as an elemental process of plasma power deposition. The electrons formed a star-shaped distribution with four rays along the separatrices of the QMF. The effective electron conductivity quantified as the amplitude of mean electron velocity was high around the central axis. The time-averaged mean electron velocities in the four regions of the QMF were biased under a rectification effect of the magnetic field. With increasing f , the high-conductivity region expanded and ionization was promoted. An enhancement of plasma power deposition under high driving frequencies was indicated.

学術雑誌論文

Accepted Manuscript

© 2013 The Japan Society of Applied Physics

0021-4922