Robust Surface Reconstruction in SEM Using Two BSE Detectors

Chen, Deshan; Miyamoto, Atsushi; Kaneko, Shun'ichi

Robust Surface Reconstruction in SEM Using Two BSE Detectors

Chen, Deshan; Miyamoto, Atsushi; Kaneko, Shun'ichi

IEICE Transactions on Information and Systems, 2013, E96D(10), 2224-2234

Permalink : https://hdl.handle.net/2115/54806

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論文情報

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アクセス権	open access
URI	https://hdl.handle.net/2115/54806
タイトル	Robust Surface Reconstruction in SEM Using Two BSE Detectors
著者	Chen, Deshan ; Miyamoto, Atsushi ; Kaneko, Shun'ichi
著者名 Chen, Deshan
著者名 Miyamoto, Atsushi
e-Rad_Researcher 50134789 著者名 Kaneko, Shun'ichi
言語	英語
キーワード	scanning electron microscope (SEM)
	surface reconstruction
	shadowing compensation
	backscattering electron
発行日	2013-10
出版者	Institute of Electronics, Information and Communication Engineers
収録物名	IEICE Transactions on Information and Systems
巻(号)	E96D(10)
ページ	2224-2234
抄録	This paper describes a robust three-dimensional (3D) surface reconstruction method that can automatically eliminate shadowing errors. For modeling shadowing effect, a new shadowing compensation model based on the angle distribution of backscattered electrons is introduced. Further, it is modified with respect to some practical factors. Moreover, the proposed iterative shadowing compensation method, which performs commutatively between the compensation of image intensities and the modification of the corresponding 3D surface, can effectively provide both an accurate 3D surface and compensated shadowless images after convergence.
資源タイプ	学術雑誌論文
出版タイプ	Version of Record
権利情報	Copyright ©2013 The Institute of Electronics, Information and Communication Engineers
PISSN	0916-8532
関連情報	URI http://search.ieice.org/
関連情報 (isIdenticalTo)	出版社版DOI https://doi.org/10.1587/transinf.E96.D.2224