Size, density, and shape of InAs quantum dots in closely stacked multilayers grown by the Stranski-Krastanow mode

Shiramine, Ken-ichi; Muto, Shunichi; Shibayama, Tamaki; Takahashi, Heishichiro; Kozaki, Tamotsu; Sato, Seichi; Nakata, Yoshiaki; Yokoyama, Naoki

Size, density, and shape of InAs quantum dots in closely stacked multilayers grown by the Stranski-Krastanow mode

Shiramine, Ken-ichi; Muto, Shunichi; Shibayama, Tamaki et al.

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003, 21(5), 2054-2059

Permalink : https://hdl.handle.net/2115/5856

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アクセス権	open access
URI	https://hdl.handle.net/2115/5856
タイトル	Size, density, and shape of InAs quantum dots in closely stacked multilayers grown by the Stranski-Krastanow mode
著者	Shiramine, Ken-ichi ; Muto, Shunichi ; Shibayama, Tamaki ; Takahashi, Heishichiro ; Kozaki, Tamotsu ; Sato, Seichi ; Nakata, Yoshiaki ; Yokoyama, Naoki
e-Rad_Researcher 10241358 著者名 Shiramine, Ken-ichi 白峰, 賢一
e-Rad_Researcher 00114900 著者名 Muto, Shunichi
著者名 Shibayama, Tamaki
著者名 Takahashi, Heishichiro
e-Rad_Researcher 60234746 著者名 Kozaki, Tamotsu
著者名 Sato, Seichi
著者名 Nakata, Yoshiaki
著者名 Yokoyama, Naoki
言語	英語
発行日	2003-09
出版者	American Vacuum Society
収録物名	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
巻(号)	21(5)
ページ	2054-2059
抄録	Closely stacked multilayer structures of InAs islands with intermediate-layer thicknesses d of 3, 6, 10, and 20 nm were grown by the Stranski-Krastanow mode of molecular beam epitaxy and were observed using transmission electron microscopy (TEM) and atomic force microscopy (AFM). The multilayers consisted of five InAs layers each of a thickness of 1.8 monolayers and four GaAs layers each of a thickness d. Columns of coherent islands were observed by cross-sectional TEM. Changes in the size and density of the islands with d, determined by AFM, could be explained in terms of (i) change in the vertical pairing probability of islands, (ii) detachment of In from the top of the island, and (iii) surface segregation of In. The observed AFM images of the islands were elliptical. Their major axis was in the [110] direction, and the length of the minor axis was 80% of that of the major axis.
資源タイプ	学術雑誌論文
出版タイプ	Version of Record
PISSN	1071-1023
関連情報 (isIdenticalTo)	出版社版DOI https://doi.org/10.1116/1.1605429