Design of a patterned nanostructure array using a nanosecond pulsed laser

Yoshida, Yutaka; Ohnishi, Ko; Matsuo, Yasutaka et al.

AIP Advances, 2018, 8(4), 045122

Permalink : https://hdl.handle.net/2115/70991

このアイテムのアクセス数:943件（2026-08-18 02:57 集計）

ファイル	フォーマット	サイズ	閲覧回数	説明
1.5027060	pdf	3.37 MB	555

アクセス権	open access
URI	https://hdl.handle.net/2115/70991
タイトル	Design of a patterned nanostructure array using a nanosecond pulsed laser
著者	Yoshida, Yutaka ; Ohnishi, Ko ; Matsuo, Yasutaka ; Watanabe, Seiichi
著者名 Yoshida, Yutaka
著者名 Ohnishi, Ko
e-Rad_Researcher 90374652 著者名 Matsuo, Yasutaka
e-Rad_Researcher 60241353 著者名 Watanabe, Seiichi
言語	英語
発行日	2018-04
出版者	American Institute of Physics (AIP)
収録物名	AIP Advances
巻(号)	8(4)
ページ	045122
抄録	For design the patterned nanostructure array (PNSA) on material surface using a nanosecond pulsed laser, we investigated the influence of phase shift between scattered lights on silicon (Si) substrate using 30-nm-wide gold lines (GLs) spacings. At a spacing of 5,871 nm, ten nanodot (ND) arrays were formed at intervals of 533 nm by nanosecond pulsed laser. The results show that the formation of the PNSA was affected by the resonance of scattered light. We conclude that ND arrays were formed with a spacing of Lambda = n lambda. And we have designed PNSA comprising two ND arrays on the substrate. The PNSA with dimensions of 1,600 nm x 1,600 nm was prepared using GLs.
資源タイプ	学術雑誌論文
出版タイプ	Version of Record
権利情報	Creative Commons Attribution 4.0 International
PISSN	2158-3226
関連情報 (isIdenticalTo)	出版社版DOI https://doi.org/10.1063/1.5027060