open access

https://hdl.handle.net/2115/74868

Quantitative SIMS Analysis of Mo in Ti-Dilute Mo Alloys Using Isotopic Abundance

日本語

isotopic abundance

1996-04-01

日本金属学会

Journal of the Japan Institute of Metals

60(4)

406-411

For the application of SIMS (Secondary Ion Mass Spectrometry) to quantitative analysis for the dilute element in metallic alloys, it is indispensable to eliminate the disturbance which is counted with the secondary ions of the dilute element. Ti2+ ions from the Ti matrix overlap the Mo+ ions from the Ti-dilute Mo alloys However, a conventional SIMS could not be applied to separate Ti2+ ions either by its high resolution mass analysis or by the separation based on the energy profiles. Since the secondary ion intensities of Mo+ and Ti2+ are proportional to their isotopic abundances, the secondary ion intensity of Mo+ can be calculated and separated from the measured intensity. Using the ion intensity of 92Mo+ or 100Mo+ after the disturbance elimination and the normalization, a good linear relationship for the quantitative Mo analysis was obtained in the range of 766 mass ppm to 2.31 mass%Mo. The lower quantitative limit is evaluated to be 80 mass ppm due to the improved preciseness.

学術雑誌論文

Version of Record

0021-4876

1880-6880

AN00062446