Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry

Nagata, Kosuke; Bajo, Ken-ichi; Itose, Satoru; Matsuya, Miyuki; Ishihara, Morio; Uchino, Kiichiro; Yurimoto, Hisayoshi

Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry

Nagata, Kosuke; Bajo, Ken-ichi; Itose, Satoru et al.

Applied Physics Express, 2019, 12(8), 085005

Permalink : https://hdl.handle.net/2115/78865

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アクセス権	open access
URI	https://hdl.handle.net/2115/78865
タイトル	Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry
著者	Nagata, Kosuke ; Bajo, Ken-ichi ; Itose, Satoru ; Matsuya, Miyuki ; Ishihara, Morio ; Uchino, Kiichiro ; Yurimoto, Hisayoshi
著者名 Nagata, Kosuke
著者名 Bajo, Ken-ichi
著者名 Itose, Satoru
著者名 Matsuya, Miyuki
著者名 Ishihara, Morio
著者名 Uchino, Kiichiro
e-Rad_Researcher 80191485 著者名 Yurimoto, Hisayoshi
言語	英語
発行日	2019-08-01
出版者	IOP Publishing
収録物名	Applied Physics Express
巻(号)	12(8)
ページ	085005
抄録	A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to similar to 1.5 times smaller for the Ga-69(+) beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA. (C) 2019 The Japan Society of Applied Physics
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
権利情報	Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
権利情報	© 2019 The Japan Society of Applied Physics
権利情報	This is the Accepted Manuscript version of an article accepted for publication in Applied Physics Express. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.7567/1882-0786/ab30e4
PISSN	1882-0778
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.7567/1882-0786/ab30e4