open access

https://hdl.handle.net/2115/79542

Phase-resolved profiles of electron energy deposition in inductively coupled radio-frequency plasmas driven under confronting divergent magnetic fields

英語

2019-10-16

Japan Society of Applied Physics

Japanese Journal of Applied Physics

58(11)

116001

Electron motion in a cylindrical chamber under RF electric field and confronting divergent magnetic fields was simulated to evaluate the phase-resolved profiles of power deposition to electrons in a low-pressure inductively coupled magnetized plasma. There were three primary regions where the power deposition was high; a region near the RF antenna, a region near the sidewall, and a region of the partial resonance. The phase-resolved profiles of the electron energy gain G(t) and azimuthal electron velocity v θ (t) were obtained in every section defined in the chamber, and were fitted by functions with sinusoidal terms. The characteristics of G(t) and v θ (t), e.g. their asymmetry and directionality, particular to the position were discussed by comparisons between different regions with the fitting parameters and their factors, such as the amplitude of electric field, that of the azimuthal velocity, the power factor, and the phase differences from the RF electric field.

学術雑誌論文

Accepted Manuscript

Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International

This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.7567/1347-4065/ab4481

0021-4922

1347-4065