Growth kinetics and modeling of selective molecular beam epitaxial growth of GaAs ridge quantum wires on pre-patterned nonplanar substrates

Sato, Taketomo; Tamai, Isao; Hasegawa, Hideki

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004, 22(4), 2266-2274

Permalink : https://hdl.handle.net/2115/8384

このアイテムのアクセス数:1,323件（2026-01-23 08:21 集計）

閲覧可能ファイル 

ファイル フォーマット サイズ 閲覧回数 説明
TSATO39 PDF 689 KB 1,549

論文情報

ファイル出力 EndNote Basic出力 Mendeley出力

アクセス権
open access
URI
https://hdl.handle.net/2115/8384
タイトル
Growth kinetics and modeling of selective molecular beam epitaxial growth of GaAs ridge quantum wires on pre-patterned nonplanar substrates
著者
Sato, Taketomo ; Tamai, Isao ; Hasegawa, Hideki
著者名
Sato, Taketomo
著者名
Tamai, Isao
著者名
Hasegawa, Hideki
言語
英語
発行日
2004-07
出版者
American Vacuum Society
収録物名
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
巻(号)
22(4)
ページ
2266-2274
抄録
The growth kinetics involved in the selective molecular beam epitaxial growth of GaAs ridge QWRs is investigated in detail experimentally and an attempt is made to model the growth theoretically. For this purpose, detailed experiments were carried out on the growth of <110>-oriented AlGaAs-GaAs ridge quantum wires on mesa-patterned (001) GaAs substrates.Aphenomenological modeling was done based on the continuum approximation including parameters such as group III adatom lifetime, diffusion constant and migration length. Computer simulation using the resultant model well reproduces the experimentally observed growth features such as the cross-sectional structure of the ridge wire and its temporal evolution, its temperature dependence and evolution of facet boundary planes. The simple phenomenological model developed here seems to be very useful for design and precise control of the growth process.
資源タイプ
学術雑誌論文
出版タイプ
Version of Record
権利情報
© 2004 American Vacuum Society
PISSN
1071-1023
関連情報
URI
http://scitation.aip.org/jvstb/
関連情報 (isIdenticalTo)
出版社版DOI
https://doi.org/10.1116/1.1773841