open access

https://hdl.handle.net/2115/83977

High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens

英語

2021-02-01

American Institute of Physics (AIP)

Review of Scientific Instruments

92(2)

023701

In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm-100 nm were successfully resolved in the x-ray energy range of 15 keV-37.7 keV. The effective field of view was similar to 60 mu m, and the typical measurement time for one tomographic scan was 30 min-60 min. The optical system was established at the 250-m-long beamline 20XU of SPring-8 to realize greater than 100x magnification images. An apodization Fresnel zone plate (A-FZP), specifically developed for high-energy x-ray imaging, was used as the objective lens. The design of the A-FZP for high-energy imaging is discussed, and its diffraction efficiency distribution is evaluated. The spatial resolutions of this system at energies of 15 keV, 20 keV, 30 keV, and 37.7 keV were examined using a test object, and the measured values are shown to be in good agreement with theoretical values. High-energy x-ray nano-CT in combination with x-ray micro-CT is applied for 3D multiscale imaging. The entire bodies of bulky samples, similar to 1 mm in diameter, were measured with the micro-CT, and the nano-CT was used for nondestructive observation of regions of interest. Examples of multiscale CT measurements involving carbon steel, mouse bones, and a meteorite are discussed.

学術雑誌論文

Version of Record

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Akihisa Takeuchi, Kentaro Uesugi, Masayuki Uesugi, Hiroyuki Toda, Kyosuke Hirayama, Kazuyuki Shimizu, Koichi Matsuo, and Takashi Nakamura , "High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens", Review of Scientific Instruments 92, 023701 (2021) and may be found at https://doi.org/10.1063/5.0020293.

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