Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method : size and binding energy dependence on ambient gas pressure and plasma condition

Suda, Yoshiyuki; Ono, T.; Akazawa, M.; Sakai, Y.; Tsujino, J.; Homma, N.

Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method : size and binding energy dependence on ambient gas pressure and plasma condition

Suda, Yoshiyuki; Ono, T.; Akazawa, M. et al.

Thin Solid Films, 2002, 415(1-2), 15-20

Permalink : https://hdl.handle.net/2115/8945

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アクセス権	open access
URI	https://hdl.handle.net/2115/8945
タイトル	Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method : size and binding energy dependence on ambient gas pressure and plasma condition
著者	Suda, Yoshiyuki ; Ono, T. ; Akazawa, M. ; Sakai, Y. ; Tsujino, J. ; Homma, N.
e-Rad_Researcher 70301942 著者名 Suda, Yoshiyuki 須田, 善行
著者名 Ono, T.
e-Rad_Researcher 30212400 著者名 Akazawa, M.
著者名 Sakai, Y.
著者名 Tsujino, J.
著者名 Homma, N.
言語	英語
キーワード	Nanoparticle
	Laser ablation
	Carbon
	RF plasma
	Amorphous materials
発行日	2002-08-01
出版者	Elsevier
収録物名	Thin Solid Films
巻(号)	415(1-2)
ページ	15-20
抄録	Nanometer-size carbon particles were prepared on a Si substrate using pulsed laser deposition (PLD) assisted by radio frequency (RF) Ar plasma and were compared with ones prepared by PLD in vacuum and Ar gas. In both the plasma and gas ambiences, experiments were carried out in Ar pressure pAr ranging from 0.13 to 13 Pa. The particle size increased as pAr increased. However, the size obtained in the RF Ar plasma was approximately 1.5 times larger than that prepared in the Ar gas. An X-ray photoelectron spectroscopy (XPS) analysis revealed that the carbon film covered by the particles was in an amorphous state. The sp3/sp2 carbon ratio of the film was evaluated by deconvolution of XPS carbon (1s) spectra into three components, which are attributed to diamond (sp3), graphite (sp2) and carbon oxide components. The highest sp3/sp2 ratio was 0.4 in the Ar gas and Ar plasma at pAr = 0.13 Pa. The sp3/sp2 ratio decreases monotonously, as the particle size increases. The ratio obtained in the Ar plasma is larger than that in the Ar gas. The effects of pAr and plasma for nanoparticle characteristic are discussed.
資源タイプ	学術雑誌論文
出版タイプ	Accepted Manuscript
PISSN	0040-6090
関連情報	URI http://www.sciencedirect.com/science/journal/00406090
関連情報 (isVersionOf)	出版社版DOI https://doi.org/10.1016/S0040-6090(02)00532-1