open access

https://hdl.handle.net/2115/90372

Efficient vibrational excitation of molecular nitrogen in low-pressure plasma with ultralow electron temperature

英語

recombining plasma

2022-09-13

IOP Publishing

Plasma Sources Science and Technology

31(9)

94004

We investigated the vibrational temperature of molecular nitrogen in the downstream of helicon-wave excited helium and argon-based plasmas. It was confirmed by optical emission spectroscopy that the major part of the helium plasma was at a recombining state and it had an ultralow electron temperature of approximately 0.1 eV. In spite of the ultralow electron temperature, the vibrational temperature of molecular nitrogen, which was added into the helium plasma, was higher than that in the argon-based plasma at an ionizing state with an electron temperature of 1.7 eV. According to the relationship between the rate coefficient of electron impact vibrational excitation and the electron temperature, the higher vibrational temperature in the helium plasma is not attributable to the more efficient vibrational excitation. Therefore, the higher vibrational temperature is owing to the less efficient destruction of vibrational excited states in the helium plasma with the ultralow electron temperature.

学術雑誌論文

Accepted Manuscript

Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International

This is the Accepted Manuscript version of an article accepted for publication in Plasma Sources Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://iopscience.iop.org/article/10.1088/1361-6595/ac8b2f.

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