Simulation of electron energy gain in inductively coupled plasmas driven at 13.56, 27.12, and 40.68 MHz under confronting divergent magnetic fields

Okazaki, Ryota; Sugawara, Hirotake

Japanese Journal of Applied Physics, 2024, 63(12), 126001

Permalink : https://hdl.handle.net/2115/97371

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アクセス権
open access
URI
https://hdl.handle.net/2115/97371
タイトル
Simulation of electron energy gain in inductively coupled plasmas driven at 13.56, 27.12, and 40.68 MHz under confronting divergent magnetic fields
著者
著者名
Okazaki, Ryota
e-Rad_Researcher
90241356
著者名
Sugawara, Hirotake
言語
英語
キーワード
electron energy gain
inductively coupled plasmas
Monte Carlo simulation
partial resonance
confronting divergent magnetic fields
発行日
2024-12-30
出版者
IOP Publishing
収録物名
Japanese Journal of Applied Physics
巻(号)
63(12)
ページ
126001
抄録
Electron heating process in inductively coupled plasmas driven under confronting divergent magnetic fields is investigated by Monte Carlo simulations. Enhancement of the electron energy gain due to the partial resonance is demonstrated by adopting driving frequencies 27.12 and 40.68 MHz higher than the conventional 13.56 MHz. The present model reactor is arranged so that the regions of strong magnetic fields near a magnetic coil and high electric fields near the RF antenna overlap. In this configuration, with increasing driving frequency, the resonant region where the electron heating by the partial resonance occurs shifts to the region of strong magnetic and high electric fields. The enhanced electron heating observed at the higher driving frequencies indicates that the partial resonance occurs in a wider region including more electrons and under higher electric fields. The power deposition by the partial resonance exceeds the electron cooling effect of the strong magnetic fields.
資源タイプ
学術雑誌論文
出版タイプ
Accepted Manuscript
権利情報
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
権利情報
© 2024 The Japan Society of Applied Physics
This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics(JJAP). IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ad9531.
PISSN
0021-4922
関連情報 (isVersionOf)
出版社版DOI
https://doi.org/10.35848/1347-4065/ad9531