open access

https://hdl.handle.net/2115/98017

Indium Hydroxide Ceramic Targets: A Breakthrough in High-Mobility Thin-Film Transistor Technology

英語

In(OH)(3) ceramic target

2025-08-03

American Chemical Society

ACS Applied Electronic Materials

Thin-film transistors composed of a hydrogen-containing indium oxide active layer are promising candidates for backplane devices in next-generation flat panel displays, offering higher definition and faster operation. However, the hydrogen incorporation process during film deposition poses challenges for scalable and industrial development due to both safety and controllability issues. Here, we demonstrate that using indium hydroxide ceramic as the target material for film deposition overcomes the difficulties associated with hydrogen gas usage. We sintered commercially available indium hydroxide powder using a conventional ceramic process at 150-250 degrees C in air and utilized it for the deposition of hydrogen-incorporated indium oxide films via pulsed laser deposition. The resulting indium oxide films, after thermal annealing, contained a sufficient concentration of hydrogen and exhibited very high electron mobility due to significantly grown grains. Furthermore, we confirmed that the fabricated thin-film transistors exhibited comparably high performance to those produced using the gas-phase hydrogen incorporation method. This approach offers a practical pathway for hydrogen-containing indium oxide-based thin-film transistors in next-generation flat panel displays.

学術雑誌論文

Accepted Manuscript

This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Applied Electronic Materials, copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://pubs.acs.org/articlesonrequest/AOR-MMZFS2WPCKVBYBZCJ95I.