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theses (doctoral - abstract and summary of review)
西田, 章浩
Study on Atomic Layer Deposition (ALD) of Dielectric Films Using Novel Liquid Homoleptic Precursors for Advanced CMOS Devices [an abstract of dissertation and a summary of dissertation review]
次世代のCMOSデバイス向けの新規な液体ホモレプティック前駆体を用いた原子層堆積法による高誘電膜に関する研究 [論文内容及び審査の要旨]
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25-Mar-2024
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