open access

https://hdl.handle.net/2115/85898

Estimation of sheath electric field in inductively coupled hydrogen plasma on the basis of Doppler-broadened absorption spectrum of hydrogen Balmer-alpha line

英語

hydrogen Balmer-alpha line

2021-07-01

IOP Publishing

Japanese Journal of Applied Physics

60(7)

076001

We examined the applicability of the Doppler-broadened absorption spectrum of the hydrogen Balmer-alpha line to the estimation of the sheath electric field in plasma. The Stark splitting of the fine-structure components was calculated by solving the time-independent Schrodinger equation at various electric field strengths, and the theoretical absorption spectrum was obtained by the superposition of the fine-structure components with the same Doppler broadening widths. The spectrum of the Balmer-alpha line of atomic hydrogen, which was measured by standard diode laser absorption spectroscopy, was fitted with the theoretical spectrum. We succeeded in determining the translational temperature of atomic hydrogen, which was obtained from the Doppler broadening width, and the electric field strength by the spectral fitting. We have evaluated that the minimum electric field strength that can be detected by the present method is approximately 350 V cm(-1) when the translational temperature of atomic hydrogen is 400-500 K.

学術雑誌論文

Accepted Manuscript

Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International

This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ac075c

0021-4922