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In-bulk and surface structuring of sapphire by femtosecond pulses

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Title: In-bulk and surface structuring of sapphire by femtosecond pulses
Authors: Juodkazis, Saulius Browse this author
Nishimura, Koichi Browse this author
Misawa, Hiroaki Browse this author →KAKEN DB
Keywords: Dielectric breakdown
Femtosecond laser micofabrication
Issue Date: 30-May-2007
Publisher: Elsevier
Journal Title: Applied Surface Science
Volume: 253
Issue: 15
Start Page: 6539
End Page: 6544
Publisher DOI: 10.1016/j.apsusc.2007.01.097
Abstract: The actual space–time dependent intensity distribution of a tightly focused (numerical aperture NA = 1.35) Gaussian femtosecond pulse is modeled inside dielectric material. Such focusing is typically used for recording with sub-wavelength resolution inside dielectrics. The multi-pulse structuring inside the bulk and on the surface of sapphire are demonstrated. Formation of nano-cracks and nano-crystals is revealed inside the crystalline sapphire. Ripple formation on the surface is discussed in terms of the efficacy map calculated by theory given in ref. [J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Laser-induced periodic surface structure. I. Theory, Phys. Rev. B 27 (2) (1983) 1141–1154.].
Type: article (author version)
Appears in Collections:電子科学研究所 (Research Institute for Electronic Science) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: Juodkazis Saulius(ヨードカジス サウルース)

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