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Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大學工學部紀要 = Memoirs of the Faculty of Engineering, Hokkaido University >
Vol.15 No.4 >

Deposition Rate and Chemical Composition of Copper-Nickel Alloys by R. F. Sputtering

Files in This Item:
15(4)_499-506.pdf676.95 kBPDFView/Open
Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/37996

Title: Deposition Rate and Chemical Composition of Copper-Nickel Alloys by R. F. Sputtering
Authors: Yabumoto, Masao Browse this author
Watanabe, Kuniaki Browse this author
Yamashina, Toshiro Browse this author
Issue Date: Dec-1981
Publisher: Hokkaido University
Journal Title: Memoirs of the Faculty of Engineering, Hokkaido University
Journal Title(alt): 北海道大学工学部紀要
Volume: 15
Issue: 4
Start Page: 499
End Page: 506
Type: bulletin (article)
URI: http://hdl.handle.net/2115/37996
Appears in Collections:北海道大學工學部紀要 = Memoirs of the Faculty of Engineering, Hokkaido University > Vol.15 No.4

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