Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.95 >
ESCAによるGaAs酸化膜のin-deph profileの研究
Title: | ESCAによるGaAs酸化膜のin-deph profileの研究 |
Other Titles: | In-depth Profiles of Oxide Films on GaAs Studied by ESCA |
Authors: | 西野, 雅範1 Browse this author | 橋場, 正男2 Browse this author | 渡辺, 国昭3 Browse this author | 山科, 俊郎4 Browse this author | 矢部, 勝昌5 Browse this author |
Authors(alt): | Nishino, Masanori1 | Hashiba, Masao2 | Watanabe, Kuniaki3 | Yamashina, Toshiro4 | Yabe, Katsumasa5 |
Issue Date: | 31-Aug-1979 |
Publisher: | 北海道大学 |
Journal Title: | 北海道大學工學部研究報告 |
Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
Volume: | 95 |
Start Page: | 101 |
End Page: | 115 |
Type: | bulletin (article) |
URI: | http://hdl.handle.net/2115/41582 |
Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.95
|
|