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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.95 >

ESCAによるGaAs酸化膜のin-deph profileの研究

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/41582

Title: ESCAによるGaAs酸化膜のin-deph profileの研究
Other Titles: In-depth Profiles of Oxide Films on GaAs Studied by ESCA
Authors: 西野, 雅範1 Browse this author
橋場, 正男2 Browse this author
渡辺, 国昭3 Browse this author
山科, 俊郎4 Browse this author
矢部, 勝昌5 Browse this author
Authors(alt): Nishino, Masanori1
Hashiba, Masao2
Watanabe, Kuniaki3
Yamashina, Toshiro4
Yabe, Katsumasa5
Issue Date: 31-Aug-1979
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 95
Start Page: 101
End Page: 115
Type: bulletin (article)
URI: http://hdl.handle.net/2115/41582
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.95

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