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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.116 >

アルゴン-シランと窒素-シラン混合ガスのグロー放電発光スペクトル

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/41817

Title: アルゴン-シランと窒素-シラン混合ガスのグロー放電発光スペクトル
Other Titles: Emission Spectrum of the Glow Discharge in Argon-Silane and Nitrogen-Silane Mixtures
Authors: 下妻, 光夫1 Browse this author →KAKEN DB
長谷川, 英機2 Browse this author →KAKEN DB
田頭, 博昭3 Browse this author →KAKEN DB
Authors(alt): Shimozuma, Mitsuo1
Hasegawa, Hideki2
Tagashira, Hiroaki3
Issue Date: 31-Oct-1983
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 116
Start Page: 51
End Page: 59
Type: bulletin (article)
URI: http://hdl.handle.net/2115/41817
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.116

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