アルゴン-シランと窒素-シラン混合ガスのグロー放電発光スペクトル


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/41817

Title:	アルゴン-シランと窒素-シラン混合ガスのグロー放電発光スペクトル
Other Titles:	Emission Spectrum of the Glow Discharge in Argon-Silane and Nitrogen-Silane Mixtures
Authors:	下妻, 光夫¹ Browse this author →KAKEN DB
	長谷川, 英機² Browse this author →KAKEN DB
	田頭, 博昭³ Browse this author →KAKEN DB
Authors(alt):	Shimozuma, Mitsuo¹
	Hasegawa, Hideki²
	Tagashira, Hiroaki³
Issue Date:	31-Oct-1983
Publisher:	北海道大学
Journal Title:	北海道大學工學部研究報告
Journal Title(alt):	Bulletin of the Faculty of Engineering, Hokkaido University
Volume:	116
Start Page:	51
End Page:	59
Type:	bulletin (article)
URI:	http://hdl.handle.net/2115/41817
Appears in Collections:	北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.116

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