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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.128 >

フレオンガスによる炭素鋼の反応性スパッタ・エッチングの研究 : 酸素ガス混合の効果について

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/41959

Title: フレオンガスによる炭素鋼の反応性スパッタ・エッチングの研究 : 酸素ガス混合の効果について
Other Titles: A Study of Reactive Sputter Etching for Carbon Steel by Freon Gas : On the Effect of Oxygen Gas Mixture
Authors: 勇田, 敏夫1 Browse this author
小山内, 潤2 Browse this author
佐藤, 敏一3 Browse this author
高橋, 達男4 Browse this author
Authors(alt): Yuhta, Toshio1
Osanai, Jun2
Satoh, Toshikazu3
Takahashi, Tatsuo4
Issue Date: 31-Oct-1985
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 128
Start Page: 51
End Page: 55
Type: bulletin (article)
URI: http://hdl.handle.net/2115/41959
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.128

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