|
Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.128 >
フレオンガスによる炭素鋼の反応性スパッタ・エッチングの研究 : 酸素ガス混合の効果について
| Title: | フレオンガスによる炭素鋼の反応性スパッタ・エッチングの研究 : 酸素ガス混合の効果について |
| Other Titles: | A Study of Reactive Sputter Etching for Carbon Steel by Freon Gas : On the Effect of Oxygen Gas Mixture |
| Authors: | 勇田, 敏夫1 Browse this author | | 小山内, 潤2 Browse this author | | 佐藤, 敏一3 Browse this author | | 高橋, 達男4 Browse this author |
| Authors(alt): | Yuhta, Toshio1 | | Osanai, Jun2 | | Satoh, Toshikazu3 | | Takahashi, Tatsuo4 |
| Issue Date: | 31-Oct-1985 |
| Publisher: | 北海道大学 |
| Journal Title: | 北海道大學工學部研究報告 |
| Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
| Volume: | 128 |
| Start Page: | 51 |
| End Page: | 55 |
| Type: | bulletin (article) |
| URI: | http://hdl.handle.net/2115/41959 |
| Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.128
|
|
